Inventor · disambiguated record
Yuri Glukhoy
Also filed as: GLUKHOY YURI
14 granted patents·2 pending applications·186 citations·filing 2001–2019
92Inventor score
Top patents by PatentIndex Score
16 records- 0196US9484190B2Showerhead-cooler system of a semiconductor-processing chamber for semiconductor wafers of large areaGLUKHOY YURI·Filed 2014·Granted Nov 1, 2016·23 cites·11 claims
- 0292US7967945B2RF antenna assembly for treatment of inner surfaces of tubes with inductively coupled plasmaGLUKHOY YURI·Filed 2008·Granted Jun 28, 2011·48 cites·16 claims
- 0391US9273393B2Torch system for depositing protective coatings on interior walls and recesses present on the flat surface of an objectGLUKHOY YURI·Filed 2014·Granted Mar 1, 2016·6 cites·12 claims
- 0491US6803585B2Electron-cyclotron resonance type ion beam source for ion implanterFiled 2001·Granted Oct 12, 2004·50 cites·25 claims
- 0584US10730239B13D printing apparatus using a beam of an atmospheric pressure inductively coupled plasma generatorGLUKHOY YURI·Filed 2019·Granted Aug 4, 2020·7 cites·20 claims
- 0681US9275840B2Method for providing uniform distribution of plasma density in a plasma treatment apparatusGLUKHOY YURI·Filed 2014·Granted Mar 1, 2016·5 cites·8 claims
- 0776US7071466B2Mass spectrometry system for continuous control of environmentNGX INC·Filed 2004·Granted Jul 4, 2006·13 cites·29 claims
- 0873US7148472B2Aerosol mass spectrometer for operation in a high-duty mode and method of mass-spectrometryNGX INC·Filed 2004·Granted Dec 12, 2006·11 cites·29 claims
- 0972US10991592B2Modified etch-and-deposit Bosch process in siliconMain Law Cafe·Filed 2019·Granted Apr 27, 2021·2 cites·3 claims
- 1071US6974957B2Ionization device for aerosol mass spectrometer and method of ionizationNANOMAT INC·Filed 2004·Granted Dec 13, 2005·10 cites·33 claims
- 1164US10475628B2Plasma beam penetration of millimeter scale holes with high aspect ratiosNANOCOATING PLASMA SYSTEMS INC·Filed 2019·Granted Nov 12, 2019·1 cites·9 claims
- 1264US6783629B2Plasma treatment apparatus with improved uniformity of treatment and method for improving uniformity of plasma treatmentFiled 2002·Granted Aug 31, 2004·6 cites·12 claims
- 1358US6791079B2Mass spectrometer based on the use of quadrupole lenses with angular gradient of the electrostatic fieldFiled 2002·Granted Sep 14, 2004·4 cites·21 claims
- 1452US8062470B2Method and apparatus for application of thin coatings from plasma onto inner surfaces of hollow containersGLUKHOY YURI·Filed 2008·Granted Nov 22, 2011·0 cites·10 claims
- 1538US2009284421A1RF antenna assembly having an antenna with transversal magnetic field for generation of inductively coupled plasmaGLUKHOY YURI·Filed 2008·Application pending·0 cites
- 1634US2005258149A1Method and apparatus for manufacture of nanoparticlesGLUKHOY YURI·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →