Inventor · disambiguated record
Yuta Goto
Also filed as: GOTO YUTA
2 granted patents·1 pending application·4 citations·filing 2017–2023
50Inventor score
Top patents by PatentIndex Score
3 records- 0178US10236225B2Method for PECVD overlay improvementAPPLIED MATERIALS INC·Filed 2018·Granted Mar 19, 2019·2 cites·20 claims
- 0277US9947599B2Method for PECVD overlay improvementAPPLIED MATERIALS INC·Filed 2017·Granted Apr 17, 2018·2 cites·20 claims
- 0349US2025296032A1Concentration measurement method, and recovery method and recovery device for carbon dioxideNITERRA CO LTD·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →