Inventor · disambiguated record
Yukinori Hanada
Also filed as: HANADA YUKINORI
3 granted patents·1 pending application·46 citations·filing 2010–2019
66Inventor score
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0194US10748746B2Microwave output device and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Aug 18, 2020·42 cites·20 claims
- 0270US9455153B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2013·Granted Sep 27, 2016·4 cites·8 claims
- 0343US10847353B2Pulse monitor device and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Nov 24, 2020·0 cites·20 claims
- 0434US2010248489A1Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →