Inventor · disambiguated record
Yusaku Hirota
Also filed as: HIROTA YUSAKU
2 granted patents·4 pending applications·10 citations·filing 2005–2012
53Inventor score
Top patents by PatentIndex Score
6 records- 0176US8037891B2Two-fluid nozzle for cleaning substrate and substrate cleaning apparatusTOKYO ELECTRON LTD·Filed 2005·Granted Oct 18, 2011·8 cites·11 claims
- 0263US7989283B2Manufacturing method of semiconductor deviceRENESAS ELECTRONICS CORP·Filed 2010·Granted Aug 2, 2011·2 cites·16 claims
- 0345US2013189835A1Method for cleaning a semiconductor deviceRENESAS ELECTRONICS CORP·Filed 2012·Application pending·0 cites
- 0445US2009014028A1Method of cleaning substrates and substrate cleanerKURITA WATER IND LTD·Filed 2008·Application pending·0 cites
- 0543US2009137118A1Method of manufacturing semiconductor deviceRENESAS TECH CORP·Filed 2008·Application pending·0 cites
- 0641US2010330794A1Method for cleaning a semiconductor deviceRENESAS TECH CORP·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →