Inventor · disambiguated record
Yu Imamura
Also filed as: IMAMURA YU
1 granted patent·1 pending application·0 citations·filing 2022–2024
13Inventor score
Technology areasH10P
Files withEBARA CORP2
Top patents by PatentIndex Score
2 records- 0164US2025001472A1Substrate cleaning device, substrate processing apparatus, break-in device, method for estimating number of fine particles adhering to substrate, method for determining degree of contamination of substrate cleaning member, and method for determining break-in processingEBARA CORP·Filed 2024·Application pending·0 cites
- 0257US12128449B2Substrate cleaning device, substrate processing apparatus, break-in device, method for estimating number of fine particles adhering to substrate, method for determining degree of contamination of substrate cleaning member, and method for determining break-in processingEBARA CORP·Filed 2022·Granted Oct 29, 2024·0 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →