Inventor · disambiguated record
Yu Ishii
Also filed as: ISHII YU
32 granted patents·5 pending applications·562 citations·filing 1998–2024
96Inventor score
Top patents by PatentIndex Score
37 records- 0197USD777546SWork holder for polishing apparatusEBARA CORP·Filed 2015·Granted Jan 31, 2017·407 cites·1 claims
- 0293US7837534B2Apparatus for heating or cooling a polishing surface of a polishing apparatusEBARA CORP·Filed 2008·Granted Nov 23, 2010·26 cites·8 claims
- 0392US9067296B2Polishing methodONO KATSUTOSHI·Filed 2012·Granted Jun 30, 2015·14 cites·12 claims
- 0488US10328465B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2013·Granted Jun 25, 2019·6 cites·27 claims
- 0588US9393595B2Abrasive film fabrication method and abrasive filmEBARA CORP·Filed 2013·Granted Jul 19, 2016·3 cites·17 claims
- 0687US9492910B2Polishing methodEBARA CORP·Filed 2015·Granted Nov 15, 2016·5 cites·5 claims
- 0785US9566616B2Substrate processing apparatusEBARA CORP·Filed 2014·Granted Feb 14, 2017·5 cites·13 claims
- 0884US11511389B2Polishing head and polishing apparatusEBARA CORP·Filed 2019·Granted Nov 29, 2022·3 cites·11 claims
- 0984US8360817B2Polishing apparatus and polishing methodEBARA CORP·Filed 2010·Granted Jan 29, 2013·7 cites·12 claims
- 1080US10458020B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2016·Granted Oct 29, 2019·3 cites·12 claims
- 1179US9808903B2Method of polishing back surface of substrate and substrate processing apparatusEBARA CORP·Filed 2014·Granted Nov 7, 2017·3 cites·16 claims
- 1279US6609950B2Method for polishing a substrateEBARA CORP·Filed 2001·Granted Aug 26, 2003·20 cites·10 claims
- 1377US6544111B1Polishing apparatus and polishing table thereforEBARA CORP·Filed 1999·Granted Apr 8, 2003·41 cites·10 claims
- 1475US2024316720A1Substrate processing control system, substrate processing control method, and programEBARA CORP·Filed 2024·Application pending·0 cites
- 1572US12036634B2Substrate processing control system, substrate processing control method, and programEBARA CORP·Filed 2017·Granted Jul 16, 2024·1 cites·13 claims
- 1672US11139160B2Apparatus and method for processing a surface of a substrateEBARA CORP·Filed 2018·Granted Oct 5, 2021·1 cites·14 claims
- 1769US11446784B2Chemical mechanical polishing apparatus for polishing workpieceEBARA CORP·Filed 2019·Granted Sep 20, 2022·0 cites·8 claims
- 1867US11618123B2Polishing method and polishing apparatusEBARA CORP·Filed 2020·Granted Apr 4, 2023·0 cites·12 claims
- 1965US10016875B2Abrasive film fabrication method and abrasive filmEBARA CORP·Filed 2016·Granted Jul 10, 2018·0 cites·4 claims
- 2064US11192147B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2019·Granted Dec 7, 2021·0 cites·9 claims
- 2164US10799917B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2019·Granted Oct 13, 2020·0 cites·20 claims
- 2263US7291057B2Apparatus for polishing a substrateEBARA CORP·Filed 2003·Granted Nov 6, 2007·7 cites·6 claims
- 2357US9808836B2Substrate processing apparatusEBARA CORP·Filed 2014·Granted Nov 7, 2017·0 cites·8 claims
- 2456US2017312880A1Chemical mechanical polishing apparatus for polishing workpieceEBARA CORP·Filed 2015·Application pending·0 cites
- 2556US2021354262A1Film thickness measurement apparatus, polishing apparatus, and film thickness measurement methodEBARA CORP·Filed 2021·Application pending·0 cites
- 2655US11180853B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2019·Granted Nov 23, 2021·0 cites·13 claims
- 2751US2024001506A1Retainer, top ring, and substrate processing apparatusEBARA CORP·Filed 2021·Application pending·0 cites
- 2849US10926376B2Method and apparatus for polishing a substrate, and method for processing a substrateEBARA CORP·Filed 2018·Granted Feb 23, 2021·0 cites·17 claims
- 2948US10854473B2Polishing method, polishing apparatus, and substrate processing systemEBARA CORP·Filed 2018·Granted Dec 1, 2020·0 cites·17 claims
- 3047US10376929B2Apparatus and method for polishing a surface of a substrateEBARA CORP·Filed 2017·Granted Aug 13, 2019·0 cites·18 claims
- 3145USD845568SPad holder for polishing apparatusEBARA CORP·Filed 2015·Granted Apr 9, 2019·4 cites·1 claims
- 3244US9821429B2Polishing pad and chemical mechanical polishing apparatus for polishing a workpiece, and method of polishing a workpiece using the chemical mechanical polishing apparatusEBARA CORP·Filed 2013·Granted Nov 21, 2017·0 cites·36 claims
- 3343US11701750B2Top ring for holding a substrate and substrate processing apparatusEBARA CORP·Filed 2020·Granted Jul 18, 2023·0 cites·18 claims
- 3441US11436392B2Substrate processing apparatus and storage medium having program stored thereinEBARA CORP·Filed 2018·Granted Sep 6, 2022·0 cites·13 claims
- 3540US10651057B2Apparatus and method for cleaning a back surface of a substrateEBARA CORP·Filed 2017·Granted May 12, 2020·0 cites·12 claims
- 3640US2019184517A1Substrate processing apparatus, substrate processing method, and storage medium storing programEBARA CORP·Filed 2018·Application pending·0 cites
- 3738US6186872B1PolisherEBARA CORP·Filed 1998·Granted Feb 13, 2001·6 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →