Inventor · disambiguated record
Yuuji Kamikawa
Also filed as: KAMIKAWA YUUJI
12 granted patents·748 citations·filing 1992–1997
94Inventor score
Top patents by PatentIndex Score
12 records- 0197US5369891ASubstrate drying apparatusTOKYO ELECTRON LTD·Filed 1993·Granted Dec 6, 1994·91 cites·13 claims
- 0290US5445699AProcessing apparatus with a gas distributor having back and forth parallel movement relative to a workpiece support surfaceTEL KYUSHU KK·Filed 1993·Granted Aug 29, 1995·92 cites·14 claims
- 0389US5301700AWashing systemTOKYO ELECTRON LTD·Filed 1993·Granted Apr 12, 1994·132 cites·12 claims
- 0485US5845660ASubstrate washing and drying apparatus, substrate washing method, and substrate washing apparatusTOKYO ELECTRON LTD·Filed 1996·Granted Dec 8, 1998·84 cites·20 claims
- 0585US5370142ASubstrate washing deviceTOKYO ELECTRON LTD·Filed 1993·Granted Dec 6, 1994·99 cites·15 claims
- 0684US6001191ASubstrate washing method, substrate washing-drying method, substrate washing apparatus and substrate washing-drying apparatusTOKYO ELECTRON LTD·Filed 1996·Granted Dec 14, 1999·76 cites·8 claims
- 0777US5443540AApparatus and method for drying substratesTOKYO ELECTRON LTD·Filed 1993·Granted Aug 22, 1995·62 cites·10 claims
- 0866US5782990AMethod for washing objectsTOKYO ELECTRON LTD·Filed 1997·Granted Jul 21, 1998·23 cites·4 claims
- 0964US5887604AWashing apparatus, and washing methodTOKYO ELECTRON LTD·Filed 1996·Granted Mar 30, 1999·21 cites·6 claims
- 1064US5671764AWashing apparatus, and washing methodTOKYO ELECTRON LTD·Filed 1995·Granted Sep 30, 1997·21 cites·15 claims
- 1152US5253663ATransfer apparatusTOKYO ELECTRON LTD·Filed 1992·Granted Oct 19, 1993·26 cites·7 claims
- 1250US5431179AWafer drying apparatus and fire-extinguishing method thereforTOKYO ELECTRON LTD·Filed 1994·Granted Jul 11, 1995·21 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →