Inventor · disambiguated record
Yuki Kawada
Also filed as: KAWADA YUKI
6 granted patents·6 pending applications·1 citations·filing 2017–2025
65Inventor score
Top patents by PatentIndex Score
12 records- 0168US10553402B2Antenna device and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Feb 4, 2020·1 cites·17 claims
- 0263US12420471B2Forming system and forming methodHONDA MOTOR CO LTD·Filed 2023·Granted Sep 23, 2025·0 cites·11 claims
- 0359US12159771B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Dec 3, 2024·0 cites·13 claims
- 0452US2025210331A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0549US2025149309A1Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0647US2022270862A1Substrate support, plasma processing system, and plasma etching methodTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0746US10896811B2Antenna device, radiation method of electromagnetic waves, plasma processing apparatus, and plasma processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Jan 19, 2021·0 cites·18 claims
- 0840US10832892B2Antenna, plasma processing device and plasma processing methodTOKYO ELECTRON LTD·Filed 2018·Granted Nov 10, 2020·0 cites·18 claims
- 0940US10825658B2Antenna and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Nov 3, 2020·0 cites·13 claims
- 1040US2019279845A1Antenna device and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 1135US2019244789A1Microwave output device and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
- 1231US2019267216A1Microwave output device and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Yuki Kawada files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →