Inventor · disambiguated record
Yuki Keimoto
Also filed as: KEIMOTO YUKI
1 granted patent·1 pending application·0 citations·filing 2018–2019
6Inventor score
Files withTOKYO ELECTRON LTD2
Top patents by PatentIndex Score
2 records- 0146US10584414B2Substrate processing method that includes step of introducing ballast gas to exhaust line while supplying processing gasTOKYO ELECTRON LTD·Filed 2018·Granted Mar 10, 2020·0 cites·3 claims
- 0235US2020048764A1Film Forming Apparatus and Film Forming MethodTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →