Inventor · disambiguated record
Yuichiro Kunugimoto
Also filed as: KUNUGIMOTO YUICHIRO
8 granted patents·6 pending applications·0 citations·filing 2015–2025
72Inventor score
Files withTOKYO ELECTRON LTD14
Top patents by PatentIndex Score
14 records- 0176US12057327B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2023·Granted Aug 6, 2024·0 cites·8 claims
- 0276US2024371661A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0368US2024272554A1Method of detecting liquid in liquid processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0466US12174549B2Liquid amount measuring method and computer-readable recording mediumTOKYO ELECTRON LTD·Filed 2023·Granted Dec 24, 2024·0 cites·5 claims
- 0558US11726409B2Substrate processing system, liquid amount measuring method, computer-readable recording medium, and measuring jigTOKYO ELECTRON LTD·Filed 2021·Granted Aug 15, 2023·0 cites·13 claims
- 0656US11914298B2Liquid processing apparatus and method of detecting liquid in liquid processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Feb 27, 2024·0 cites·11 claims
- 0756US11637031B2Systems and methods for spin process video analysis during substrate processingTOKYO ELECTRON LTD·Filed 2020·Granted Apr 25, 2023·0 cites·19 claims
- 0855US2019206702A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 0954US2025240390A1Monitoring apparatus, substrate processing apparatus, monitoring method, and storage mediumTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 1053US2025112066A1Liquid processing apparatus, and monitoring methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1151US2023253219A1Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1247US12244972B2Substrate processing monitoring apparatus based on imaging video data, substrate processing apparatus, substrate processing monitoring method, and storage mediumTOKYO ELECTRON LTD·Filed 2020·Granted Mar 4, 2025·0 cites·20 claims
- 1342US10248030B2Process recipe evaluation method, storage medium, assisting device for process recipe evaluation, and liquid processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Apr 2, 2019·0 cites·9 claims
- 1436US9766543B2Liquid treatment method, substrate processing apparatus and non-transitory storage mediumTOKYO ELECTRON LTD·Filed 2015·Granted Sep 19, 2017·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →