Inventor · disambiguated record
Yunfeng Lan
Also filed as: LAN YUNFENG
2 granted patents·2 pending applications·0 citations·filing 2021–2022
22Inventor score
Top patents by PatentIndex Score
4 records- 0152US2025163577A1Semiconductor apparatus and gas distributor of semiconductor apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2022·Application pending·0 cites
- 0248US12431376B2Semiconductor process chamber, semiconductor process equipment, and semiconductor process methodBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2022·Granted Sep 30, 2025·0 cites·11 claims
- 0343US2025087480A1Plasma-enhanced atomic layer deposition apparatus and method thereofBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2022·Application pending·0 cites
- 0442US12494391B2Semiconductor processing apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2021·Granted Dec 9, 2025·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →