Inventor · disambiguated record
Yu Machida
Also filed as: MACHIDA YU
1 granted patent·3 pending applications·0 citations·filing 2018–2022
7Inventor score
Files withEBARA CORP4
Top patents by PatentIndex Score
4 records- 0155US2022130662A1Substrate processing device, substrate processing method, and storage medium storing program for causing computer to execute method for controlling substrate processing deviceEBARA CORP·Filed 2022·Application pending·0 cites
- 0247US2020066510A1Substrate processing device, substrate processing method, and storage medium storing program for causing computer to execute method for controlling substrate processing deviceEBARA CORP·Filed 2019·Application pending·0 cites
- 0340US10811284B2Substrate processing method and apparatusEBARA CORP·Filed 2018·Granted Oct 20, 2020·0 cites·5 claims
- 0440US2019184517A1Substrate processing apparatus, substrate processing method, and storage medium storing programEBARA CORP·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →