Inventor · disambiguated record
Yuya Minoura
Also filed as: MINOURA Yuya
6 granted patents·2 pending applications·0 citations·filing 2016–2024
64Inventor score
Files withTOKYO ELECTRON LTD8
Top patents by PatentIndex Score
8 records- 0173US12080521B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2023·Granted Sep 3, 2024·0 cites·19 claims
- 0269US12315709B2Method of performing maintenance on substrate processing apparatusTOKYO ELECTRON LTD·Filed 2024·Granted May 27, 2025·0 cites·22 claims
- 0362US11749508B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Sep 5, 2023·0 cites·16 claims
- 0446US11688609B2Etching method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Jun 27, 2023·0 cites·12 claims
- 0546US10811275B2Plasma etching method and plasma etching apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Oct 20, 2020·0 cites·15 claims
- 0643US2017133204A1Member for Plasma Processing Apparatus and Plasma Processing ApparatusTOKYO ELECTRON LTD·Filed 2016·Application pending·0 cites
- 0741US2022028670A1Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0838US11920242B2Temperature control method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Mar 5, 2024·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →