Inventor · disambiguated record

Yukio Nakazima

Also filed as: NAKAZIMA YUKIO

1 granted patent·64 citations·filing 1994–1994

50Inventor score

Technology areasB24B

Files withSHINETSU HANDOTAI KK1

Top patents by PatentIndex Score

1 record

0183US5573448AMethod of polishing wafers, a backing pad used therein, and method of making the backing padSHINETSU HANDOTAI KK·Filed 1994·Granted Nov 12, 1996·64 cites·5 claims

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