Inventor · disambiguated record
Yukinobu Numata
Also filed as: NUMATA YUKINOBU
2 granted patents·4 pending applications·0 citations·filing 2012–2023
23Inventor score
Top patents by PatentIndex Score
6 records- 0145US2025361601A1Method for controlling specific resistivity and stress of tungsten through pvd sputtering methodULVAC INC·Filed 2023·Application pending·0 cites
- 0243US2024120233A1Vacuum processing apparatusULVAC INC·Filed 2022·Application pending·0 cites
- 0338US10975465B2Method of forming internal stress control filmULVAC INC·Filed 2017·Granted Apr 13, 2021·0 cites·8 claims
- 0435US9337092B2Method of manufacturing semiconductor deviceULVAC INC·Filed 2012·Granted May 10, 2016·0 cites·3 claims
- 0527US2014332959A1Method of manufacturing semiconductor device and semiconductor deviceHAMAGUCHI JUNICHI·Filed 2012·Application pending·0 cites
- 0627US2017004995A1Film Forming Apparatus and Film Forming MethodULVAC INC·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →