Inventor · disambiguated record
Yukinobu Otsuka
Also filed as: OTSUKA YUKINOBU
3 granted patents·5 pending applications·3 citations·filing 2018–2025
54Inventor score
Files withTOKYO ELECTRON LTD8
Top patents by PatentIndex Score
8 records- 0178US11798821B2Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2020·Granted Oct 24, 2023·2 cites·17 claims
- 0270US2025321490A1Substrate treatment method, substrate treatment apparatus, and computer storage mediumTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0359US2024402609A1Developing apparatus, substrate treatment system, and developing methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0459US2024030049A1Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0555US11049738B2Substrate heating deviceTOKYO ELECTRON LTD·Filed 2018·Granted Jun 29, 2021·1 cites·12 claims
- 0653US2025339873A1Heating apparatus, heating method, and computer-readable recording mediumTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0752US2024249951A1Substrate treatment method, substrate treatment apparatus, and computer storage mediumTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0839US11393702B2Heat treatment apparatus and heat treatment methodTOKYO ELECTRON LTD·Filed 2020·Granted Jul 19, 2022·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →