Inventor · disambiguated record

Yuval Perets

Also filed as: PERETS YUVAL

3 granted patents·5 citations·filing 2016–2018

58Inventor score

Technology areasG03F

Files withZEISS CARL SMT GMBH3

Top patents by PatentIndex Score

3 records

0184US10670955B2Critical dimension variation correction in extreme ultraviolet lithographyZEISS CARL SMT GMBH·Filed 2018·Granted Jun 2, 2020·3 cites·5 claims
0277US10095101B2Critical dimension variation correction in extreme ultraviolet lithographyZEISS CARL SMT GMBH·Filed 2016·Granted Oct 9, 2018·2 cites·12 claims
0345US10578975B2Method for correcting the critical dimension uniformity of a photomask for semiconductor lithographyZEISS CARL SMT GMBH·Filed 2018·Granted Mar 3, 2020·0 cites·11 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →