Inventor · disambiguated record
Yuhei Sakaguchi
Also filed as: SAKAGUCHI YUHEI
10 granted patents·4 pending applications·28 citations·filing 2009–2024
82Inventor score
Top patents by PatentIndex Score
14 records- 0195US10655220B2Gas control system, deposition apparatus including gas control system, and program and gas control method used for gas control systemHORIBA STEC CO LTD·Filed 2018·Granted May 19, 2020·7 cites·19 claims
- 0284US10927462B2Gas control system and film formation apparatus provided with gas control systemHORIBA STEC CO LTD·Filed 2017·Granted Feb 23, 2021·4 cites·12 claims
- 0380US9823181B2Cp2Mg concentration measuring deviceHORIBA STEC CO LTD·Filed 2016·Granted Nov 21, 2017·2 cites·6 claims
- 0479US8459290B2Material gas concentration control systemMINAMI MASAKAZU·Filed 2009·Granted Jun 11, 2013·15 cites·12 claims
- 0571US12332175B2Optical measurement cell, optical analyzer, window forming member, and method of manufacturing optical measurement cellHORIBA STEC CO LTD·Filed 2022·Granted Jun 17, 2025·0 cites·6 claims
- 0667US12429420B2Gas analysis apparatus and gas analysis methodHORIBA STEC CO LTD·Filed 2023·Granted Sep 30, 2025·0 cites·8 claims
- 0762US2024094176A1Gas analysis device, fluid control system, gas analysis program, and gas analysis methodHORIBA STEC CO LTD·Filed 2023·Application pending·0 cites
- 0861US11796460B2Absorbance analysis apparatus for DCR gas, absorbance analysis method for DCR gas, and absorbance analysis program recording medium on which program for DCR gas is recordedTOKYO ELECTRON LTD·Filed 2022·Granted Oct 24, 2023·0 cites·5 claims
- 0958US12467856B2Gas analysis device and gas analysis methodHORIBA STEC CO LTD·Filed 2021·Granted Nov 11, 2025·0 cites·11 claims
- 1056US2025218827A1End point detection device, etching control system, end point detection method, and end point detection programHORIBA STEC CO LTD·Filed 2024·Application pending·0 cites
- 1154US11493443B2Light absorbance analysis apparatus and program record medium for recording programs of light absorbance analysis apparatusHORIBA STEC CO LTD·Filed 2020·Granted Nov 8, 2022·0 cites·5 claims
- 1254US11226235B2Absorption spectroscopic system, program recording medium for an absorption spectroscopic system and absorbance measurement methodHORIBA STEC CO LTD·Filed 2020·Granted Jan 18, 2022·0 cites·7 claims
- 1353US2024030013A1Analysis device, analysis method, and analysis programHORIBA STEC CO LTD·Filed 2023·Application pending·0 cites
- 1438US2019242818A1Absorbance meter and semiconductor manufacturing device using absorbance meterHORIBA STEC CO LTD·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →