Inventor · disambiguated record
Yukio Sano
Also filed as: SANO YUKIO
4 granted patents·1 pending application·21 citations·filing 1990–2020
70Inventor score
Top patents by PatentIndex Score
5 records- 0176US11390944B2Film-forming device and method for cleaning sameTOKYO ELECTRON LTD·Filed 2017·Granted Jul 19, 2022·3 cites·5 claims
- 0251USD766850SWafer holder for manufacturing semiconductorTOKYO ELECTRON LTD·Filed 2014·Granted Sep 20, 2016·8 cites·1 claims
- 0347US4996763AMethod of locating work in automatic exposing apparatusORC MFG CO LTD·Filed 1990·Granted Mar 5, 1991·10 cites·2 claims
- 0442US12065732B2Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Aug 20, 2024·0 cites·8 claims
- 0536US2021108331A1Film forming apparatus and film forming methodTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →