Inventor · disambiguated record
Yukihiro Shibata
Also filed as: SHIBATA YUKIHIRO
93 granted patents·19 pending applications·1,915 citations·filing 1992–2024
99Inventor score
Files withHITACHI LTD26HITACHI HIGH TECH CORP22KYOCERA DOCUMENT SOLUTIONS INC14SHIBATA YUKIHIRO13TOYOTA MOTOR CO LTD5
Top patents by PatentIndex Score
112 records- 0198US6621571B1Method and apparatus for inspecting defects in a patterned specimenHITACHI LTD·Filed 2000·Granted Sep 16, 2003·149 cites·30 claims
- 0296US6556290B2Defect inspection method and apparatus thereforHITACHI LTD·Filed 2001·Granted Apr 29, 2003·75 cites·38 claims
- 0395US8228494B2Apparatus for inspecting defectsSHIBATA YUKIHIRO·Filed 2011·Granted Jul 24, 2012·13 cites·11 claims
- 0495US7714997B2Apparatus for inspecting defectsHITACHI HIGH TECH CORP·Filed 2007·Granted May 11, 2010·22 cites·15 claims
- 0595US7400393B2Method and apparatus for detecting defects in a specimen utilizing information concerning the specimenHITACHI HIGH TECH CORP·Filed 2006·Granted Jul 15, 2008·28 cites·7 claims
- 0695US6400454B1Apparatus and method for inspector defectsHITACHI LTD·Filed 2000·Granted Jun 4, 2002·67 cites·20 claims
- 0794US7274813B2Defect inspection method and apparatusHITACHI LTD·Filed 2005·Granted Sep 25, 2007·18 cites·24 claims
- 0894US6690469B1Method and apparatus for observing and inspecting defectsHITACHI LTD·Filed 1999·Granted Feb 10, 2004·98 cites·35 claims
- 0993US8107717B2Defect inspection method and apparatusMAEDA SHUNJI·Filed 2011·Granted Jan 31, 2012·14 cites·16 claims
- 1093US8004666B2Apparatus for inspecting defectsHITACHI HIGH TECH CORP·Filed 2010·Granted Aug 23, 2011·10 cites·14 claims
- 1193US7859656B2Defect inspection method and systemHITACHI HIGH TECH CORP·Filed 2009·Granted Dec 28, 2010·15 cites·18 claims
- 1293US6762831B2Method and apparatus for inspecting defectsHITACHI LTD·Filed 2002·Granted Jul 13, 2004·45 cites·12 claims
- 1392US8922764B2Defect inspection method and defect inspection apparatusURANO YUTA·Filed 2011·Granted Dec 30, 2014·12 cites·12 claims
- 1492US5583543APen input processing apparatusSHARP KK·Filed 1993·Granted Dec 10, 1996·208 cites·35 claims
- 1591US7492452B2Defect inspection method and systemHITACHI HIGH TECH CORP·Filed 2007·Granted Feb 17, 2009·13 cites·13 claims
- 1691US7359044B2Method and apparatus for inspecting pattern defectsHITACHI HIGH TECH CORP·Filed 2005·Granted Apr 15, 2008·17 cites·23 claims
- 1791US6947587B1Defect inspection method and apparatusHITACHI LTD·Filed 1999·Granted Sep 20, 2005·88 cites·30 claims
- 1890US6674890B2Defect inspection method and apparatus thereforHITACHI LTD·Filed 2000·Granted Jan 6, 2004·41 cites·10 claims
- 1990US6169282B1Defect inspection method and apparatus thereforHITACHI LTD·Filed 1998·Granted Jan 2, 2001·107 cites·32 claims
- 2090US6091075AAutomatic focus detection method, automatic focus detection apparatus, and inspection apparatusHITACHI LTD·Filed 1998·Granted Jul 18, 2000·99 cites·42 claims
- 2190US5329289AData processor with rotatable displaySHARP KK·Filed 1992·Granted Jul 12, 1994·229 cites·5 claims
- 2289US9976966B2Defect inspection method and its deviceHITACHI HIGH TECH CORP·Filed 2016·Granted May 22, 2018·3 cites·4 claims
- 2389US7372561B2Method and apparatus for inspecting defects and a system for inspecting defectsHITACHI HIGH TECH CORP·Filed 2005·Granted May 13, 2008·15 cites·15 claims
- 2488US8416402B2Method and apparatus for inspecting defectsSHIBATA YUKIHIRO·Filed 2012·Granted Apr 9, 2013·6 cites·14 claims
- 2588US7173693B2Method for inspecting defects and an apparatus of the sameHITACHI LTD·Filed 2005·Granted Feb 6, 2007·11 cites·15 claims
- 2688US5684565APattern detecting method, pattern detecting apparatus, projection exposing apparatus using the same and exposure systemHITACHI LTD·Filed 1994·Granted Nov 4, 1997·57 cites·33 claims
- 2788US5302999AIllumination method, illumination apparatus and projection exposure apparatusHITACHI LTD·Filed 1993·Granted Apr 12, 1994·91 cites·32 claims
- 2887US9310318B2Defect inspection method and defect inspection deviceHITACHI HIGH TECH CORP·Filed 2015·Granted Apr 12, 2016·3 cites·10 claims
- 2987US8830465B2Defect inspecting apparatus and defect inspecting methodTANIGUCHI ATSUSHI·Filed 2011·Granted Sep 9, 2014·7 cites·14 claims
- 3086US7599545B2Method and its apparatus for inspecting defectsHITACHI HIGH TECH CORP·Filed 2004·Granted Oct 6, 2009·27 cites·30 claims
- 3186US6850320B2Method for inspecting defects and an apparatus for the sameHITACHI LTD·Filed 2001·Granted Feb 1, 2005·26 cites·12 claims
- 3285US9329137B2Defect inspection method and device using sameHITACHI HIGH TECH CORP·Filed 2014·Granted May 3, 2016·4 cites·12 claims
- 3385US7826047B2Apparatus and method for optical inspectionHITACHI HIGH TECH CORP·Filed 2006·Granted Nov 2, 2010·15 cites·23 claims
- 3485US7142294B2Method and apparatus for detecting defectsHITACHI LTD·Filed 2001·Granted Nov 28, 2006·22 cites·11 claims
- 3584US7508973B2Method of inspecting defectsHITACHI HIGH TECH CORP·Filed 2004·Granted Mar 24, 2009·37 cites·10 claims
- 3683US8670116B2Method and device for inspecting for defectsNAKAO TOSHIYUKI·Filed 2011·Granted Mar 11, 2014·6 cites·16 claims
- 3783US7440092B2Method and apparatus for detecting defectsHITACHI LTD·Filed 2006·Granted Oct 21, 2008·7 cites·6 claims
- 3883US7161671B2Method and apparatus for inspecting defectsHITACHI LTD·Filed 2004·Granted Jan 9, 2007·16 cites·13 claims
- 3982US7512259B2Defect inspection method and apparatusHITACHI LTD·Filed 2007·Granted Mar 31, 2009·7 cites·4 claims
- 4081US9513228B2Defect inspection method and its deviceHITACHI HIGH TECH CORP·Filed 2012·Granted Dec 6, 2016·3 cites·20 claims
- 4181US8804110B2Fault inspection device and fault inspection methodURANO YUTA·Filed 2011·Granted Aug 12, 2014·4 cites·8 claims
- 4281US8681328B2Dark-field defect inspecting method, dark-field defect inspecting apparatus, aberration analyzing method, and aberration analyzing apparatusTANIGUCHI ATSUSHI·Filed 2010·Granted Mar 25, 2014·4 cites·18 claims
- 4381US6654112B2Apparatus and method for inspecting defectsHITACHI LTD·Filed 2002·Granted Nov 25, 2003·16 cites·16 claims
- 4480US9523648B2Defect inspection device and defect inspection methodHITACHI HIGH TECH CORP·Filed 2013·Granted Dec 20, 2016·3 cites·8 claims
- 4580US7463350B2Method and apparatus for detecting defects of a sample using a dark field signal and a bright field signalHITACHI HIGH TECH CORP·Filed 2004·Granted Dec 9, 2008·17 cites·9 claims
- 4679US8454754B2Cleaning method and method for manufacturing electronic deviceSHIBATA YUKIHIRO·Filed 2008·Granted Jun 4, 2013·6 cites·17 claims
- 4779US8203706B2Method and apparatus for inspecting defectsSHIBATA YUKIHIRO·Filed 2009·Granted Jun 19, 2012·5 cites·12 claims
- 4879US7092095B2Method and apparatus for observing and inspecting defectsHITACHI LTD·Filed 2004·Granted Aug 15, 2006·11 cites·14 claims
- 4979US6819416B2Defect inspection method and apparatus thereforHITACHI LTD·Filed 2002·Granted Nov 16, 2004·12 cites·22 claims
- 5078US7916929B2Defect inspection method and apparatusHITACHI LTD·Filed 2009·Granted Mar 29, 2011·5 cites·16 claims
Showing the top 50 of 112 patent records by PatentIndex Score.
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