Inventor · disambiguated record
Yuji Takabatake
Also filed as: TAKABATAKE YUJI
1 granted patent·2 pending applications·0 citations·filing 2014–2015
2Inventor score
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0139US2014345523A1Substrate ejection detection device, method of detecting substrate ejection and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 0237US10002417B2Ready for rotation state detection device, method of detecting ready for rotation state and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Jun 19, 2018·0 cites·15 claims
- 0336US2015240357A1Substrate processing apparatus using rotatable tableTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →