Inventor · disambiguated record
Yuya Takamura
Also filed as: TAKAMURA YUYA
2 granted patents·4 pending applications·0 citations·filing 2017–2023
23Inventor score
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0152US2024170281A1Deposition method and deposition apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0249US11538678B2Deposition methodTOKYO ELECTRON LTD·Filed 2020·Granted Dec 27, 2022·0 cites·10 claims
- 0346US2023326762A1Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0446US2023096299A1Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0544US2022411933A1Film forming apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0624US10297439B2Film forming method and film forming systemTOKYO ELECTRON LTD·Filed 2017·Granted May 21, 2019·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →