Inventor · disambiguated record
Yudai Takanaga
Also filed as: TAKANAGA YUDAI
1 granted patent·1 pending application·0 citations·filing 2022–2025
13Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD2
Top patents by PatentIndex Score
2 records- 0163US2025232988A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0259US12300518B2Substrate processing apparatus and substrate processing method having enhanced configuration of replenishing processing liquidTOKYO ELECTRON LTD·Filed 2022·Granted May 13, 2025·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →