Inventor · disambiguated record
Yukio Tokuda
Also filed as: TOKUDA YUKIO
9 granted patents·3 pending applications·327 citations·filing 1986–2012
91Inventor score
Top patents by PatentIndex Score
12 records- 0193US5187519AExposure apparatus having mount means to suppress vibrationsCANON KK·Filed 1991·Granted Feb 16, 1993·87 cites·11 claims
- 0287US5691806AProjection exposure apparatus containing an enclosed hollow structureCANON KK·Filed 1995·Granted Nov 25, 1997·28 cites·23 claims
- 0384US6320649B1Stage system for exposure apparatusCANON KK·Filed 1999·Granted Nov 20, 2001·53 cites·28 claims
- 0480US6493062B2Driving apparatus and exposure apparatusCANON KK·Filed 1999·Granted Dec 10, 2002·61 cites·57 claims
- 0579US7463334B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2007·Granted Dec 9, 2008·5 cites·8 claims
- 0677US4757355AMask storing mechanismCANON KK·Filed 1986·Granted Jul 12, 1988·27 cites·9 claims
- 0773US6320645B1Stage system and exposure apparatus, and device manufacturing method using the sameCANON KK·Filed 1999·Granted Nov 20, 2001·30 cites·13 claims
- 0867US4775877AMethod and apparatus for processing a plate-like workpieceCANON KK·Filed 1986·Granted Oct 4, 1988·34 cites·23 claims
- 0945US2013033822A1Image acquisition apparatus and image acquisition systemCANON KK·Filed 2012·Application pending·0 cites
- 1040US2013141562A1MicroscopeYANO MASASHI·Filed 2011·Application pending·0 cites
- 1136US2012314050A1Imaging apparatus and control method thereforNAWATA RYO·Filed 2012·Application pending·0 cites
- 1232US6103433AExposure method using reticle remount for temperature influence correctionCANON KK·Filed 1998·Granted Aug 15, 2000·2 cites·24 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →