Inventor · disambiguated record
Yuuji Urano
Also filed as: URANO Yuuji
1 granted patent·1 pending application·0 citations·filing 2013–2020
13Inventor score
Technology areasH10P
Top patents by PatentIndex Score
2 records- 0157US12461507B2Substrate processing apparatus, substrate processing method, semiconductor device manufacturing method, and control programKOKUSAI ELECTRIC CORP·Filed 2020·Granted Nov 4, 2025·0 cites·18 claims
- 0249US2015370245A1Substrate processing apparatus, substrate processing method, semiconductor device manufacturing method, and control programHITACHI INT ELECTRIC INC·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →