Inventor · disambiguated record
Yuichiro Wagatsuma
Also filed as: WAGATSUMA YUICHIRO
7 granted patents·2 pending applications·0 citations·filing 2018–2022
67Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD9
Top patents by PatentIndex Score
9 records- 0155US12347676B2Substrate processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2022·Granted Jul 1, 2025·0 cites·15 claims
- 0253US12482695B2Substrate treatment method and substrate treatment deviceTOKYO ELECTRON LTD·Filed 2021·Granted Nov 25, 2025·0 cites·12 claims
- 0352US11417514B2Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Aug 16, 2022·0 cites·11 claims
- 0449US11476132B2Sealing structure, vacuum processing apparatus and sealing methodTOKYO ELECTRON LTD·Filed 2020·Granted Oct 18, 2022·0 cites·7 claims
- 0547US11664266B2Substrate processing apparatus and substrate delivery methodTOKYO ELECTRON LTD·Filed 2020·Granted May 30, 2023·0 cites·20 claims
- 0646US11915964B2Substrate processing apparatus and stageTOKYO ELECTRON LTD·Filed 2020·Granted Feb 27, 2024·0 cites·10 claims
- 0743US2021005502A1Stage, substrate processing apparatus and stage assembling methodTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 0841US10811264B2Film-forming method and film-forming apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Oct 20, 2020·0 cites·8 claims
- 0940US2020335385A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →