Inventor · disambiguated record
Yusuke Wako
Also filed as: WAKO YUSUKE
1 granted patent·4 pending applications·1 citations·filing 2022–2025
17Inventor score
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0182US11798793B2Substrate processing method, component processing method, and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Oct 24, 2023·1 cites·17 claims
- 0273US2025323055A1Etching methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0365US2023268191A1Etching methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0464US2024006168A1Substrate processing method, component processing method, and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0554US2022389584A1Shower head, electrode unit, gas supply unit, substrate processing apparatus, and substrate processing systemTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Yusuke Wako files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →