Inventor · disambiguated record
Yu-Wei Yang
Also filed as: YANG YU-WEI
2 granted patents·1 pending application·13 citations·filing 2005–2010
57Inventor score
Top patents by PatentIndex Score
3 records- 0172US7479458B1Methods and apparatus for the optimization of highly selective process gasesLAM RES CORP·Filed 2005·Granted Jan 20, 2009·8 cites·16 claims
- 0270US7662723B2Methods and apparatus for in-situ substrate processingLAM RES CORP·Filed 2006·Granted Feb 16, 2010·5 cites·15 claims
- 0336US2010108262A1Apparatus for in-situ substrate processingHWANG GUANG-YAW·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →