Inventor · disambiguated record
Zhongwei Chen
Also filed as: CHEN ZHONGWEI
115 granted patents·18 pending applications·846 citations·filing 2002–2025
99Inventor score
Top patents by PatentIndex Score
133 records- 0198US10879031B2Apparatus of plural charged-particle beamsASML NETHERLANDS BV·Filed 2019·Granted Dec 29, 2020·30 cites·20 claims
- 0298US10643820B2Apparatus of plural charged-particle beamsASML NETHERLANDS BV·Filed 2019·Granted May 5, 2020·29 cites·13 claims
- 0398US10141160B2Apparatus of plural charged-particle beamsHERMES MICROVISION INC·Filed 2016·Granted Nov 27, 2018·42 cites·76 claims
- 0498US10062541B2Apparatus of plural charged-particle beamsHERMES MICROVISION INC·Filed 2017·Granted Aug 28, 2018·34 cites·79 claims
- 0598US9922799B2Apparatus of plural charged-particle beamsHERMES MICROVISION INC·Filed 2016·Granted Mar 20, 2018·64 cites·22 claims
- 0698US9691586B2Apparatus of plural charged-particle beamsHERMES MICROVISION INC·Filed 2017·Granted Jun 27, 2017·64 cites·5 claims
- 0798US9691588B2Apparatus of plural charged-particle beamsHERMES MICROVISION INC·Filed 2016·Granted Jun 27, 2017·33 cites·19 claims
- 0898US9607805B2Apparatus of plural charged-particle beamsHERMES MICROVISION INC·Filed 2016·Granted Mar 28, 2017·62 cites·23 claims
- 0997US11094499B1Apparatus of charged-particle beam such as electron microscope comprising sliding specimen table within objective lensCHEN ZHONGWEI·Filed 2021·Granted Aug 17, 2021·5 cites·20 claims
- 1097US10395886B2Apparatus of plural charged-particle beamsASML NETHERLANDS BV·Filed 2016·Granted Aug 27, 2019·16 cites·44 claims
- 1197US8294095B2Apparatus of plural charged particle beams with multi-axis magnetic lensCHEN ZHONGWEI·Filed 2010·Granted Oct 23, 2012·51 cites·23 claims
- 1296US11705304B2Apparatus of plural charged-particle beamsASML NETHERLANDS BV·Filed 2021·Granted Jul 18, 2023·2 cites·18 claims
- 1395US10236156B2Apparatus of plural charged-particle beamsHERMES MICROVISION INC·Filed 2016·Granted Mar 19, 2019·13 cites·32 claims
- 1494US9000395B2Energy filter for charged particle beam apparatusHERMES MICROVISION INC·Filed 2014·Granted Apr 7, 2015·16 cites·6 claims
- 1594US8436317B1Wien filterCHEN ZHONGWEI·Filed 2011·Granted May 7, 2013·19 cites·26 claims
- 1694US6815345B2Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturingHERMES MICROVISION TAIWAN INC·Filed 2002·Granted Nov 9, 2004·101 cites·5 claims
- 1793US11257659B1Electrode assembly, electronic apparatus/device using the same, and apparatus of charged-particle beam such as electron microscope using the sameCHEN ZHONGWEI·Filed 2021·Granted Feb 22, 2022·2 cites·9 claims
- 1893US10541110B2Apparatus of plural charged-particle beamsASML NETHERLANDS BV·Filed 2018·Granted Jan 21, 2020·5 cites·9 claims
- 1993US10109456B2Apparatus of plural charged-particle beamsHERMES MICROVISION INC·Filed 2017·Granted Oct 23, 2018·5 cites·26 claims
- 2093US7960697B2Electron beam apparatusHERMES MICROVISION INC·Filed 2008·Granted Jun 14, 2011·24 cites·20 claims
- 2192US10008360B2Objective lens system for fast scanning large FOVHERMES MICROVISION INC·Filed 2016·Granted Jun 26, 2018·6 cites·24 claims
- 2292US9048062B1Method for improving performance of an energy filterHERMES MICROVISION INC·Filed 2015·Granted Jun 2, 2015·8 cites·13 claims
- 2392US8445862B2Apparatus of plural charged particle beams with multi-axis magnetic lensCHEN ZHONGWEI·Filed 2010·Granted May 21, 2013·16 cites·42 claims
- 2492US8003953B2Multi-axis magnetic lensHERMES MICROVISION INC·Filed 2009·Granted Aug 23, 2011·18 cites·14 claims
- 2592US7825386B2System and method for a charged particle beamHERMES MICROVISION INC·Filed 2007·Granted Nov 2, 2010·16 cites·32 claims
- 2691US11043354B2Apparatus of plural charged-particle beamsASML NETHERLANDS BV·Filed 2020·Granted Jun 22, 2021·2 cites·17 claims
- 2791US10115559B2Apparatus of plural charged-particle beamsHERMES MICROVISION INC·Filed 2017·Granted Oct 30, 2018·4 cites·2 claims
- 2891US8274046B1Monochromator for charged particle beam apparatusREN WEIMING·Filed 2011·Granted Sep 25, 2012·13 cites·30 claims
- 2990US10784077B2Systems and methods for charged particle flooding to enhance voltage contrast defect signalASML NETHERLANDS BV·Filed 2018·Granted Sep 22, 2020·5 cites·19 claims
- 3090US10573487B2Apparatus of plural charged-particle beamsASML NETHERLANDS BV·Filed 2018·Granted Feb 25, 2020·3 cites·21 claims
- 3190US2025112023A1Apparatus of plural charged-particle beamsASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 3289US11664189B2Apparatus of charged-particle beam such as scanning electron microscope comprising plasma generator, and method thereofBORRIES PTE LTD·Filed 2022·Granted May 30, 2023·1 cites·20 claims
- 3389US11569059B2Apparatus of charged-particle beam such as electron microscope comprising plasma generator, and method thereofCHEN ZHONGWEI·Filed 2021·Granted Jan 31, 2023·1 cites·18 claims
- 3489US7919760B2Operation stage for wafer edge inspection and reviewHERMES MICROVISION INC·Filed 2008·Granted Apr 5, 2011·15 cites·10 claims
- 3588US12237143B2Apparatus of plural charged-particle beamsASML NETHERLANDS BV·Filed 2023·Granted Feb 25, 2025·0 cites·20 claims
- 3688US11664186B1Apparatus of electron beam comprising pinnacle limiting plate and method of reducing electron-electron interactionBORRIES PTE LTD·Filed 2022·Granted May 30, 2023·1 cites·20 claims
- 3788US9431209B2Apparatus of plural charged particle beams with multi-axis magnetic lensesHERMES-MICROVISION INC·Filed 2015·Granted Aug 30, 2016·5 cites·33 claims
- 3888US8421029B1Wien filter with reduced field leakageREN WEIMING·Filed 2011·Granted Apr 16, 2013·9 cites·39 claims
- 3988US8350213B2Charged particle beam detection unit with multi type detection subunitsHERMES MICROVISION INC·Filed 2010·Granted Jan 8, 2013·7 cites·16 claims
- 4087US11295930B2Method and apparatus for charged particle detectionASML NETHERLANDS BV·Filed 2018·Granted Apr 5, 2022·3 cites·15 claims
- 4187US9048063B1Electron beam apparatusHERMES MICROVISION INC·Filed 2015·Granted Jun 2, 2015·5 cites·15 claims
- 4287US8624186B2Movable detector for charged particle beam inspection or reviewWang yi-xiang·Filed 2010·Granted Jan 7, 2014·8 cites·20 claims
- 4386US12424408B2Apparatus of plural charged-particle beamsASML NETHERLANDS BV·Filed 2023·Granted Sep 23, 2025·0 cites·20 claims
- 4486US12300458B2Objective lens system for fast scanning large FOVASML NETHERLANDS BV·Filed 2023·Granted May 13, 2025·0 cites·20 claims
- 4586US11398368B2Apparatus of plural charged-particle beamsASML NETHERLANDS BV·Filed 2020·Granted Jul 26, 2022·1 cites·20 claims
- 4685US12494342B2Systems and methods for charged particle flooding to enhance voltage contrast defect signalASML NETHERLANDS BV·Filed 2024·Granted Dec 9, 2025·0 cites·18 claims
- 4785US11887807B2Apparatus of plural charged-particle beamsASML NETHERLANDS BV·Filed 2023·Granted Jan 30, 2024·0 cites·22 claims
- 4884US11593938B2Rapid and automatic virus imaging and analysis system as well as methods thereofCHEN ZHONGWEI·Filed 2021·Granted Feb 28, 2023·1 cites·23 claims
- 4984US9184024B2Selectable coulomb aperture in E-beam systemCHEN ZHONGWEI·Filed 2011·Granted Nov 10, 2015·6 cites·19 claims
- 5084US9117626B1Energy-discrimination detection deviceHERMES MICROVISION INC·Filed 2015·Granted Aug 25, 2015·3 cites·14 claims
Showing the top 50 of 133 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →