Inventor · disambiguated record
Zhaohui Cheng
Also filed as: CHENG ZHAOHUI
25 granted patents·9 pending applications·111 citations·filing 2003–2024
94Inventor score
Files withHITACHI HIGH TECH CORP21YANGTZE MEMORY TECH CO LTD5CHENG ZHAOHUI2DONGKE SEMICONDUCTOR ANHUI CO LTD1MATSUI HIROYUKI1
Top patents by PatentIndex Score
34 records- 0196US7683319B2Charge control apparatus and measurement apparatus equipped with the charge control apparatusHITACHI HIGH TECH CORP·Filed 2006·Granted Mar 23, 2010·36 cites·14 claims
- 0289US7394070B2Method and apparatus for inspecting patternsHITACHI HIGH TECH CORP·Filed 2005·Granted Jul 1, 2008·14 cites·14 claims
- 0385US7218126B2Inspection method and apparatus for circuit patternHITACHI HIGH TECH CORP·Filed 2005·Granted May 15, 2007·7 cites·10 claims
- 0484US7655906B2Method and apparatus for scanning and measurement by electron beamHITACHI HIGH TECH CORP·Filed 2006·Granted Feb 2, 2010·13 cites·18 claims
- 0581US9287084B2Aberration corrector and charged particle beam apparatus using the sameHITACHI HIGH TECH CORP·Filed 2015·Granted Mar 15, 2016·3 cites·15 claims
- 0679US9202665B2Charged particle beam apparatus for removing charges developed on a region of a sampleMATSUI HIROYUKI·Filed 2011·Granted Dec 1, 2015·5 cites·17 claims
- 0778US7547884B2Pattern defect inspection method and apparatus thereofHITACHI HIGH TECH CORP·Filed 2006·Granted Jun 16, 2009·4 cites·23 claims
- 0875US10840060B2Scanning electron microscope and sample observation methodHITACHI HIGH TECH CORP·Filed 2018·Granted Nov 17, 2020·1 cites·16 claims
- 0975US8207513B2Charged particle beam apparatusSASAKI YUKO·Filed 2009·Granted Jun 26, 2012·3 cites·8 claims
- 1071US9991092B2Scanning electron microscope and sample observation methodCHENG ZHAOHUI·Filed 2010·Granted Jun 5, 2018·3 cites·37 claims
- 1170US9830524B2Method for estimating shape before shrink and CD-SEM apparatusSEKIGUCHI TOMOKO·Filed 2012·Granted Nov 28, 2017·4 cites·13 claims
- 1270US7910884B2Apparatus and method for inspection and measurementHITACHI HIGH TECH CORP·Filed 2009·Granted Mar 22, 2011·2 cites·15 claims
- 1370US6952105B2Inspection method and apparatus for circuit pattern of resist materialHITACHI HIGH TECH CORP·Filed 2003·Granted Oct 4, 2005·7 cites·12 claims
- 1467US11223486B2Digital signature method, device, and systemSHENZHEN OLYM INFORMATION SECURITY TECH CO LTD·Filed 2017·Granted Jan 11, 2022·2 cites·16 claims
- 1565US7928384B2Localized static charge distribution precision measurement method and deviceHITACHI HIGH TECH CORP·Filed 2008·Granted Apr 19, 2011·2 cites·8 claims
- 1664US10446361B2Aberration correction method, aberration correction system, and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2015·Granted Oct 15, 2019·1 cites·15 claims
- 1761US8309923B2Sample observing method and scanning electron microscopeOMORI SEIKO·Filed 2010·Granted Nov 13, 2012·2 cites·11 claims
- 1860US12400383B2Training method for learning apparatus, and image generation systemHITACHI HIGH TECH CORP·Filed 2022·Granted Aug 26, 2025·0 cites·17 claims
- 1959US12340970B2Charged particle beam device, and method for controlling charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2020·Granted Jun 24, 2025·0 cites·14 claims
- 2059US2025379152A1Semiconductor devices and methods for forming the sameYANGTZE MEMORY TECH CO LTD·Filed 2024·Application pending·0 cites
- 2157US2024407169A1Semiconductor devices and manufacturing methods thereof and memory systemsYANGTZE MEMORY TECH CO LTD·Filed 2023·Application pending·0 cites
- 2256US2024206167A1Three-dimensional memory devices and methods for forming the sameYANGTZE MEMORY TECH CO LTD·Filed 2023·Application pending·0 cites
- 2355US11769649B2Multipole unit and charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2022·Granted Sep 26, 2023·0 cites·11 claims
- 2455US7633303B2Semiconductor wafer inspection apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted Dec 15, 2009·2 cites·5 claims
- 2554US2024224519A1Memory device containing tsg deck and method of forming the sameYANGTZE MEMORY TECH CO LTD·Filed 2023·Application pending·0 cites
- 2653US7714288B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted May 11, 2010·0 cites·17 claims
- 2753US2006151698A1Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2005·Application pending·0 cites
- 2852US7652248B2Inspection apparatus and inspection methodHITACHI HIGH TECH CORP·Filed 2007·Granted Jan 26, 2010·0 cites·5 claims
- 2952US2024196632A1Semiconductor components, fabrication methods thereof and memory systemsYANGTZE MEMORY TECH CO LTD·Filed 2022·Application pending·0 cites
- 3051US2024274395A1Charged particle beam device and method for demagnetizing magnetic lensHITACHI HIGH TECH CORP·Filed 2021·Application pending·0 cites
- 3147US12327708B2Charged particle beam device and aberration correction methodHITACHI HIGH TECH CORP·Filed 2019·Granted Jun 10, 2025·0 cites·8 claims
- 3242US2008017797A1Pattern inspection and measurement apparatusCHENG ZHAOHUI·Filed 2007·Application pending·0 cites
- 3336US10727024B2Charged particle beam device and aberration correction method for charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2016·Granted Jul 28, 2020·0 cites·12 claims
- 3435US2025309220A1Half-bridge topology integration method for co-packaging gallium nitride power device and chipDONGKE SEMICONDUCTOR ANHUI CO LTD·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →