Inventor · disambiguated record
Zhumin Han
Also filed as: HAN ZHUMIN
2 granted patents·3 citations·filing 2018–2023
46Inventor score
Technology areasH10P
Files withLAM RES CORP2
Top patents by PatentIndex Score
2 records- 0179US11798789B2Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering featuresLAM RES CORP·Filed 2018·Granted Oct 24, 2023·3 cites·41 claims
- 0275US12500068B2Edge rings providing kinematic coupling and corresponding substrate processing systemsLAM RES CORP·Filed 2023·Granted Dec 16, 2025·0 cites·51 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →