Inventor · disambiguated record
Zhelin Sun
Also filed as: SUN ZHELIN
3 granted patents·1 pending application·0 citations·filing 2018–2021
44Inventor score
Technology areasH10P
Files withAPPLIED MATERIALS INC4
Top patents by PatentIndex Score
4 records- 0158US10957532B2Method and apparatus for deposition of low-k filmsAPPLIED MATERIALS INC·Filed 2019·Granted Mar 23, 2021·0 cites·17 claims
- 0257US10453678B2Method and apparatus for deposition of low-k filmsAPPLIED MATERIALS INC·Filed 2018·Granted Oct 22, 2019·0 cites·19 claims
- 0342US11990332B2Methods and apparatus for deposition of low-k filmsAPPLIED MATERIALS INC·Filed 2018·Granted May 21, 2024·0 cites·16 claims
- 0441US2024194479A1Methods and applications of novel amorphous high-k metal-oxide dielectrics by super-cycle atomic layer depositionAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →