Inventor · disambiguated record
Zhiyuan Ye
Also filed as: YE ZHIYUAN
82 granted patents·34 pending applications·433 citations·filing 2005–2025
99Inventor score
Top patents by PatentIndex Score
116 records- 0198US8029620B2Methods of forming carbon-containing silicon epitaxial layersAPPLIED MATERIALS INC·Filed 2007·Granted Oct 4, 2011·95 cites·15 claims
- 0297US9923081B1Selective process for source and drain formationAPPLIED MATERIALS INC·Filed 2017·Granted Mar 20, 2018·23 cites·20 claims
- 0397US7897495B2Formation of epitaxial layer containing silicon and carbonAPPLIED MATERIALS INC·Filed 2006·Granted Mar 1, 2011·126 cites·19 claims
- 0495US12163229B2Multi zone spot heating in EPIAPPLIED MATERIALS INC·Filed 2023·Granted Dec 10, 2024·1 cites·20 claims
- 0595US11821088B2Multi zone spot heating in EPIAPPLIED MATERIALS INC·Filed 2021·Granted Nov 21, 2023·2 cites·19 claims
- 0695US7682940B2Use of Cl2 and/or HCl during silicon epitaxial film formationAPPLIED MATERIALS INC·Filed 2005·Granted Mar 23, 2010·32 cites·37 claims
- 0793US11261538B1In-situ temperature mapping for epi chamberAPPLIED MATERIALS INC·Filed 2020·Granted Mar 1, 2022·3 cites·19 claims
- 0893US10062598B2Thermal processing susceptorAPPLIED MATERIALS INC·Filed 2015·Granted Aug 28, 2018·7 cites·12 claims
- 0993US2025364306A1Thermal processing susceptorAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 1092US10453721B2Methods and assemblies for gas flow ratio controlAPPLIED MATERIALS INC·Filed 2016·Granted Oct 22, 2019·7 cites·6 claims
- 1192US9845550B2Upper dome with injection assemblyAPPLIED MATERIALS INC·Filed 2015·Granted Dec 19, 2017·7 cites·20 claims
- 1292US8603898B2Method for forming group III/V conformal layers on silicon substratesBAO XINYU·Filed 2012·Granted Dec 10, 2013·19 cites·20 claims
- 1391US12385159B2In-situ epi growth rate control of crystal thickness micro-balancing sensorAPPLIED MATERIALS INC·Filed 2022·Granted Aug 12, 2025·2 cites·20 claims
- 1491US11021795B2Multi zone spot heating in epiAPPLIED MATERIALS INC·Filed 2018·Granted Jun 1, 2021·4 cites·19 claims
- 1590US11177144B2Wafer spot heating with beam width modulationAPPLIED MATERIALS INC·Filed 2019·Granted Nov 16, 2021·5 cites·20 claims
- 1690US10930543B2Thermal processing susceptorAPPLIED MATERIALS INC·Filed 2018·Granted Feb 23, 2021·4 cites·17 claims
- 1789US7960256B2Use of CL2 and/or HCL during silicon epitaxial film formationAPPLIED MATERIALS INC·Filed 2010·Granted Jun 14, 2011·8 cites·14 claims
- 1888US7732305B2Use of Cl2 and/or HCl during silicon epitaxial film formationAPPLIED MATERIALS INC·Filed 2006·Granted Jun 8, 2010·10 cites·21 claims
- 1987US11680338B2Linear lamp array for improved thermal uniformity and profile controlAPPLIED MATERIALS INC·Filed 2020·Granted Jun 20, 2023·2 cites·14 claims
- 2086US12400904B2Thermal processing susceptorAPPLIED MATERIALS INC·Filed 2023·Granted Aug 26, 2025·0 cites·20 claims
- 2186US2025354250A1Overlap susceptor and preheat ringAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 2286US2025069923A1Methods and assemblies for gas flow ratio controlAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2385US11604089B2Mass flow verification based on rate of pressure decayAPPLIED MATERIALS INC·Filed 2020·Granted Mar 14, 2023·1 cites·20 claims
- 2485US10269600B2Methods and assemblies for gas flow ratio controlAPPLIED MATERIALS INC·Filed 2016·Granted Apr 23, 2019·4 cites·5 claims
- 2585US9650726B2Methods and apparatus for deposition processesMYO NYI O·Filed 2011·Granted May 16, 2017·6 cites·17 claims
- 2685US7960236B2Phosphorus containing Si epitaxial layers in N-type source/drain junctionsAPPLIED MATERIALS INC·Filed 2007·Granted Jun 14, 2011·12 cites·13 claims
- 2785US7732269B2Method of ultra-shallow junction formation using Si film alloyed with carbonAPPLIED MATERIALS INC·Filed 2007·Granted Jun 8, 2010·10 cites·2 claims
- 2885US2025066918A1Multi zone spot heating in epiAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2984US12183606B2Methods and assemblies for gas flow ratio controlAPPLIED MATERIALS INC·Filed 2024·Granted Dec 31, 2024·0 cites·20 claims
- 3084US11733081B2Methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing systemAPPLIED MATERIALS INC·Filed 2021·Granted Aug 22, 2023·1 cites·20 claims
- 3183US11171023B2Diode laser for wafer heating for EPI processesAPPLIED MATERIALS INC·Filed 2016·Granted Nov 9, 2021·4 cites·20 claims
- 3283US9159554B2Structure and method of forming metamorphic heteroepi materials and III-V channel structures on siAPPLIED MATERIALS INC·Filed 2014·Granted Oct 13, 2015·5 cites·17 claims
- 3381US12371776B2Overlap susceptor and preheat ringAPPLIED MATERIALS INC·Filed 2023·Granted Jul 29, 2025·0 cites·20 claims
- 3481US12261062B2Spot heating by moving a beam with horizontal rotary motionAPPLIED MATERIALS INC·Filed 2023·Granted Mar 25, 2025·0 cites·16 claims
- 3581US10727093B2Light pipe window structure for low pressure thermal processesAPPLIED MATERIALS INC·Filed 2015·Granted Jul 28, 2020·3 cites·16 claims
- 3680US10276688B2Selective process for source and drain formationAPPLIED MATERIALS INC·Filed 2018·Granted Apr 30, 2019·2 cites·18 claims
- 3779US11923221B2Methods and assemblies for gas flow ratio controlAPPLIED MATERIALS INC·Filed 2022·Granted Mar 5, 2024·0 cites·20 claims
- 3879US2025132155A1Apparatus, systems, and methods of using atomic hydrogen radicals with selective epitaxial depositionAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 3979US2025087485A1Apparatus, systems, and methods of using atomic hydrogen radicals with selective epitaxial depositionAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4078US9460918B2Epitaxy of high tensile silicon alloy for tensile strain applicationsAPPLIED MATERIALS INC·Filed 2013·Granted Oct 4, 2016·3 cites·6 claims
- 4177US10132003B2Heating modulators to improve epi uniformity tuningAPPLIED MATERIALS INC·Filed 2017·Granted Nov 20, 2018·2 cites·22 claims
- 4277US2025201596A1Spot heating by moving a beam with horizontal rotary motionAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 4376US7772074B2Method of forming conformal silicon layer for recessed source-drainAPPLIED MATERIALS INC·Filed 2007·Granted Aug 10, 2010·5 cites·20 claims
- 4476US2023366715A1Methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (mfcs) of a substrate processing systemAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 4576US2025101629A1Multi-layer epi chamber bodyAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4675US11848226B2Thermal processing susceptorAPPLIED MATERIALS INC·Filed 2021·Granted Dec 19, 2023·0 cites·7 claims
- 4774US10458040B2Upper dome with injection assemblyAPPLIED MATERIALS INC·Filed 2017·Granted Oct 29, 2019·1 cites·20 claims
- 4874US10260164B2Methods and apparatus for deposition processesAPPLIED MATERIALS INC·Filed 2017·Granted Apr 16, 2019·1 cites·5 claims
- 4973US10866135B2Methods, systems, and apparatus for mass flow verification based on rate of pressure decayAPPLIED MATERIALS INC·Filed 2018·Granted Dec 15, 2020·1 cites·16 claims
- 5073US10770319B2EPI thickness tuning by pulse or profile spot heatingAPPLIED MATERIALS INC·Filed 2019·Granted Sep 8, 2020·1 cites·20 claims
Showing the top 50 of 116 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →