Inventor · disambiguated record
Zhongquan Zhao
Also filed as: ZHAO ZHONGQUAN
3 granted patents·14 citations·filing 2016–2018
62Inventor score
Files withCymer LLC3
Top patents by PatentIndex Score
3 records- 0187US9983060B1Calibration of a spectral analysis moduleCymer LLC·Filed 2016·Granted May 29, 2018·12 cites·25 claims
- 0279US10288484B2Homogenization of light beam for spectral feature metrologyCymer LLC·Filed 2018·Granted May 14, 2019·2 cites·23 claims
- 0353US10012544B2Homogenization of light beam for spectral feature metrologyCymer LLC·Filed 2016·Granted Jul 3, 2018·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →