Inventor · disambiguated record
Zin-Chang Wei
Also filed as: WEI ZIN-CHANG
9 granted patents·3 pending applications·109 citations·filing 2006–2015
88Inventor score
Files withTAIWAN SEMICONDUCTOR MFG5TAIWAN SEMICONDUCTOR MFG CO LTD3WEI ZIN-CHANG2CHANG CHUN-LIN1HUNG KUN-KU1
Top patents by PatentIndex Score
12 records- 0194US8404572B2Multi-zone temperature control for semiconductor waferCHANG CHUN-LIN·Filed 2009·Granted Mar 26, 2013·40 cites·20 claims
- 0291US7732344B1High selectivity etching process for metal gate N/P patterningTAIWAN SEMICONDUCTOR MFG·Filed 2009·Granted Jun 8, 2010·26 cites·20 claims
- 0390US10113233B2Multi-zone temperature control for semiconductor waferTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Oct 30, 2018·6 cites·14 claims
- 0484US8409997B2Apparatus and method for controlling silicon nitride etching tankWEI ZIN-CHANG·Filed 2007·Granted Apr 2, 2013·11 cites·16 claims
- 0584US8277286B2Slurry dispenser for chemical mechanical polishing (CMP) apparatus and methodHUNG KUN-KU·Filed 2009·Granted Oct 2, 2012·17 cites·19 claims
- 0681US9105591B2Rotatable and tunable heaters for semiconductor furnaceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Aug 11, 2015·4 cites·6 claims
- 0780US9023664B2Multi-zone temperature control for semiconductor waferTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted May 5, 2015·3 cites·11 claims
- 0865US8536491B2Rotatable and tunable heaters for semiconductor furnaceWEI ZIN-CHANG·Filed 2009·Granted Sep 17, 2013·2 cites·17 claims
- 0952US8834671B2Apparatus and method for controlling silicon nitride etching tankTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Sep 16, 2014·0 cites·12 claims
- 1051US2010181500A1Method and system for low temperature ion implantationTAIWAN SEMICONDUCTOR MFG·Filed 2009·Application pending·0 cites
- 1146US2010291840A1System and method for conditioning chemical mechanical polishing apparatus using multiple conditioning disksTAIWAN SEMICONDUCTOR MFG·Filed 2009·Application pending·0 cites
- 1241US2008047589A1Apparatus and methods of cleaning substratesTAIWAN SEMICONDUCTOR MFG·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →