Inventor · disambiguated record
Zilu Weng
Also filed as: Weng Zilu
4 granted patents·1 pending application·12 citations·filing 2015–2023
67Inventor score
Files withAPPLIED MATERIALS INC5
Top patents by PatentIndex Score
5 records- 0193US11594428B2Low temperature chuck for plasma processing systemsAPPLIED MATERIALS INC·Filed 2017·Granted Feb 28, 2023·9 cites·16 claims
- 0282US10504700B2Plasma etching systems and methods with secondary plasma injectionAPPLIED MATERIALS INC·Filed 2015·Granted Dec 10, 2019·3 cites·20 claims
- 0377US12009228B2Low temperature chuck for plasma processing systemsAPPLIED MATERIALS INC·Filed 2023·Granted Jun 11, 2024·0 cites·19 claims
- 0463US11476093B2Plasma etching systems and methods with secondary plasma injectionAPPLIED MATERIALS INC·Filed 2019·Granted Oct 18, 2022·0 cites·20 claims
- 0548US2016225652A1Low temperature chuck for plasma processing systemsAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →