Inventor · disambiguated record
Zili Zhou
Also filed as: ZHOU ZILI
13 granted patents·5 pending applications·19 citations·filing 2016–2024
87Inventor score
Files withASML NETHERLANDS BV18
Top patents by PatentIndex Score
18 records- 0194US11385553B2Metrology method, patterning device, apparatus and computer programASML NETHERLANDS BV·Filed 2021·Granted Jul 12, 2022·2 cites·20 claims
- 0287US10983445B2Method and apparatus for measuring a parameter of interest using image plane detection techniquesASML NETHERLANDS BV·Filed 2019·Granted Apr 20, 2021·3 cites·20 claims
- 0387US10191391B2Metrology method and apparatus, computer program and lithographic systemASML NETHERLANDS BV·Filed 2016·Granted Jan 29, 2019·4 cites·19 claims
- 0486US10996570B2Metrology method, patterning device, apparatus and computer programASML NETHERLANDS BV·Filed 2019·Granted May 4, 2021·2 cites·25 claims
- 0586US10795269B2Method of determining a value of a parameter of interest, method of cleaning a signal containing information about a parameter of interest, device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Oct 6, 2020·3 cites·15 claims
- 0686US10747124B2Method of measuring a target, metrology apparatus, polarizer assemblyASML NETHERLANDS BV·Filed 2019·Granted Aug 18, 2020·2 cites·11 claims
- 0784US10599047B2Metrology apparatus, lithographic system, and method of measuring a structureASML NETHERLANDS BV·Filed 2018·Granted Mar 24, 2020·2 cites·15 claims
- 0877US10353298B2Method of measuring a target, metrology apparatus, polarizer assemblyASML NETHERLANDS BV·Filed 2017·Granted Jul 16, 2019·1 cites·20 claims
- 0964US12326669B2Illumination apparatus and associated metrology and lithographic apparatusesASML NETHERLANDS BV·Filed 2023·Granted Jun 10, 2025·0 cites·19 claims
- 1063US10423077B2Metrology method and apparatus, computer program and lithographic systemASML NETHERLANDS BV·Filed 2018·Granted Sep 24, 2019·0 cites·18 claims
- 1162US2025208522A1Illumination module and associated methods and metrology apparatusASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 1262US2025314975A1Focus measurment and control in metrology and associated wedge arrangementASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 1357US12265229B2Method and apparatus for coherence scrambling in metrology applicationsASML NETHERLANDS BV·Filed 2020·Granted Apr 1, 2025·0 cites·11 claims
- 1457US2024288782A1Metrology method and associated metrology toolASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1553US11042100B2Measurement apparatus and method of measuring a targetASML NETHERLANDS BV·Filed 2019·Granted Jun 22, 2021·0 cites·13 claims
- 1651US2024085379A1Methods and apparatus for acoustic metrologyASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 1751US2025067768A1Element of an afm toolASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1848US12209994B2Method and metrology tool for determining information about a target structure, and cantilever probeASML NETHERLANDS BV·Filed 2020·Granted Jan 28, 2025·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →