Inventor · disambiguated record
Zoilo Cheng Ho Tan
Also filed as: TAN ZOILO C H · TAN ZOILO CHENG HO
5 granted patents·1 pending application·166 citations·filing 1988–2003
84Inventor score
Top patents by PatentIndex Score
6 records- 0191US6200736B1Photoresist developer and methodETEC SYSTEMS INC·Filed 2000·Granted Mar 13, 2001·56 cites·13 claims
- 0268US5091047APlasma etching using a bilayer maskNAT SEMICONDUCTOR CORP·Filed 1991·Granted Feb 25, 1992·49 cites·7 claims
- 0366US5045150APlasma etching using a bilayer maskNAT SEMICONDUCTOR CORP·Filed 1988·Granted Sep 3, 1991·35 cites·12 claims
- 0465US6107009APhotoresist developer and methodFiled 1999·Granted Aug 22, 2000·23 cites·12 claims
- 0539US7135256B2Method of increasing the shelf life of a photomask substrateAPPLIED MATERIALS INC·Filed 2003·Granted Nov 14, 2006·3 cites·33 claims
- 0633US2002071995A1Photoresist topcoat for deep ultraviolet (DUV) direct write laser mask fabricationFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →