Inventor · disambiguated record

Christoph Rene Konrad Cebulla Hennerkes

Also filed as: KONRAD CEBULLA HENNERKES CHRISTOPH RENE

1 granted patent·0 citations·filing 2022–2022

13Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV1

Top patents by PatentIndex Score

1 record

0176US11977334B2Wavefront optimization for tuning scanner based on performance matchingASML NETHERLANDS BV·Filed 2022·Granted May 7, 2024·0 cites·20 claims

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