Inventor · disambiguated record

Hiroki Fukusima

Also filed as: FUKUSHIMA HIROKI

1 granted patent·66 citations·filing 1992–1992

50Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

1 record

0174US5316472AVertical boat used for heat treatment of semiconductor wafer and vertical heat treatment apparatusTOKYO ELECTRON LTD·Filed 1992·Granted May 31, 1994·66 cites·24 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →