Inventor · name-matched record
BREKERBOHM LUTZ
0 granted patents·3 pending applications·0 citations·filing 2025–2025
Technology areasG03F
Files withZEISS CARL SMT GMBH3
This identity is grouped by exact name match (no disambiguated inventor record was available for these filings) — it may combine same-named inventors.
Top patents by PatentIndex Score
3 records- 0183US2026043752A1Mask inspection apparatus, vacuum seal component, and method for adjusting a mask inspection apparatusZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0280US2026036900A1Mask inspection device and method for adjusting a mask inspection deviceZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0379US2026068351A1Method for treating a photosensor, system for treating a photosensor, and optical measuring system comprising such a systemZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
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Identity basis: exact name match across USPTO filings. How scoring works →