Inventor · name-matched record
CHAE SOO-DOO
4 granted patents·3 pending applications·0 citations·filing 2022–2025
52Inventor score
Files withTOKYO ELECTRON LTD7
This identity is grouped by exact name match (no disambiguated inventor record was available for these filings) — it may combine same-named inventors.
Top patents by PatentIndex Score
7 records- 0189US2026082871A1Extreme ultraviolet lithography patterning methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0263US12575391B2Methods for fabricating semiconductor devices with backside power delivery network using laser liftoff layerTOKYO ELECTRON LTD·Filed 2023·Granted Mar 10, 2026·0 cites·18 claims
- 0360US12598747B2Fabricating three-dimensional semiconductor structuresTOKYO ELECTRON LTD·Filed 2022·Granted Apr 7, 2026·0 cites·20 claims
- 0459US2026047070A1Integration method of vertical dram with periphery circuitTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0554US12538560B2Methods for fabricating isolation structures using directional beam processTOKYO ELECTRON LTD·Filed 2022·Granted Jan 27, 2026·0 cites·17 claims
- 0653US12577665B2Next generation bonding layer for 3D heterogeneous integrationTOKYO ELECTRON LTD·Filed 2022·Granted Mar 17, 2026·0 cites·18 claims
- 0750US2026026016A1Method of making an electrode without a lithography maskTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
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Identity basis: exact name match across USPTO filings. How scoring works →