Inventor · name-matched record
CHANG SHIHSHENG
3 granted patents·2 pending applications·0 citations·filing 2022–2024
38Inventor score
Files withTOKYO ELECTRON LTD5
This identity is grouped by exact name match (no disambiguated inventor record was available for these filings) — it may combine same-named inventors.
Top patents by PatentIndex Score
5 records- 0160US12598932B2Methods and structures for improving etch profile of underlying layersTOKYO ELECTRON LTD·Filed 2023·Granted Apr 7, 2026·0 cites·18 claims
- 0260US2026036910A1Angled beam exposure for hardmask based modificationTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0357US2026096364A1Low-temperature etching of carbon-containing layersTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0455US12588262B2Sacrificial gate capping layer for gate protection during source/drain contact openingTOKYO ELECTRON LTD·Filed 2022·Granted Mar 24, 2026·0 cites·19 claims
- 0555US12568677B2Method of self-aligned dielectric wall formation for forksheet applicationTOKYO ELECTRON LTD·Filed 2023·Granted Mar 3, 2026·0 cites·17 claims
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Identity basis: exact name match across USPTO filings. How scoring works →