Inventor · name-matched record
KATSUKI SHINGO
2 granted patents·0 citations·filing 2023–2024
22Inventor score
Files withTOKYO ELECTRON LTD2
This identity is grouped by exact name match (no disambiguated inventor record was available for these filings) — it may combine same-named inventors.
Top patents by PatentIndex Score
2 records- 0161US12591180B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2024·Granted Mar 31, 2026·0 cites·12 claims
- 0247US12543530B2Substrate transfer method, substrate processing apparatus, and recording mediumTOKYO ELECTRON LTD·Filed 2023·Granted Feb 3, 2026·0 cites·16 claims
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Identity basis: exact name match across USPTO filings. How scoring works →