Inventor · name-matched record
KITAGAWA DAI
0 granted patents·4 pending applications·0 citations·filing 2025–2025
Technology areasH01J
Files withTOKYO ELECTRON LTD4
This identity is grouped by exact name match (no disambiguated inventor record was available for these filings) — it may combine same-named inventors.
Top patents by PatentIndex Score
4 records- 0184US2026031308A1Substrate processing apparatus and maintenance method for substrate processing apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0271US2026031310A1Component replacement systemTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0368US2026074160A1Substrate processing device and inner chamber assemblyTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0466US2026018394A1Cluster toolTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
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Identity basis: exact name match across USPTO filings. How scoring works →