Inventor · name-matched record
KODAMA MUNEHISA
1 granted patent·1 pending application·0 citations·filing 2021–2023
1Inventor score
Files withTOKYO ELECTRON LTD2
This identity is grouped by exact name match (no disambiguated inventor record was available for these filings) — it may combine same-named inventors.
Top patents by PatentIndex Score
2 records- 0156US2026026285A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0248US12529556B2Thickness measuring device and thickness measuring method to measure thickness of substrateTOKYO ELECTRON LTD·Filed 2021·Granted Jan 20, 2026·0 cites·11 claims
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Identity basis: exact name match across USPTO filings. How scoring works →