Inventor · name-matched record
LANE BARTON
1 granted patent·3 pending applications·0 citations·filing 2022–2025
6Inventor score
Technology areasH01J
Files withTOKYO ELECTRON LTD4
This identity is grouped by exact name match (no disambiguated inventor record was available for these filings) — it may combine same-named inventors.
Top patents by PatentIndex Score
4 records- 0191US2026045449A1Apparatus for plasma processingTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0291US2026074152A1Apparatus for edge control during plasma processingTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0364US2026066224A1Hybrid plasma sourceTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0461US12531205B2Equipment and method for improved edge uniformity of plasma processing of wafersTOKYO ELECTRON LTD·Filed 2022·Granted Jan 20, 2026·0 cites·32 claims
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Identity basis: exact name match across USPTO filings. How scoring works →