Inventor · name-matched record
LU YANFU
1 granted patent·2 pending applications·0 citations·filing 2022–2025
13Inventor score
Files withASM IP HOLDING BV3
This identity is grouped by exact name match (no disambiguated inventor record was available for these filings) — it may combine same-named inventors.
Top patents by PatentIndex Score
3 records- 0177US2026082851A1Dual pyrometer systems for substrate temperature control during film depositionASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 0275US2026005050A1Chamber arrangements with offset upper reflectors, semiconductor processing systems, and related methods of making chamber arrangements and depositing material layers onto substratesASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 0362US12564001B2Dual pyrometer systems for substrate temperature control during film depositionASM IP HOLDING BV·Filed 2022·Granted Feb 24, 2026·0 cites·14 claims
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Identity basis: exact name match across USPTO filings. How scoring works →