Inventor · name-matched record
MARBACH HUBERTUS
2 granted patents·1 pending application·0 citations·filing 2023–2025
23Inventor score
Files withZEISS CARL SMT GMBH3
This identity is grouped by exact name match (no disambiguated inventor record was available for these filings) — it may combine same-named inventors.
Top patents by PatentIndex Score
3 records- 0177US2026050208A1Remote-plasma electron-induced mask repairZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0260US12535729B2Method and apparatus for mask repairZEISS CARL SMT GMBH·Filed 2023·Granted Jan 27, 2026·0 cites·30 claims
- 0354US12586755B2Apparatus for analyzing and/or processing a sample with a particle beam and methodZEISS CARL SMT GMBH·Filed 2023·Granted Mar 24, 2026·0 cites·20 claims
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Identity basis: exact name match across USPTO filings. How scoring works →