Inventor · name-matched record
POLLAK THILO
1 granted patent·1 pending application·0 citations·filing 2022–2025
10Inventor score
Files withZEISS CARL SMT GMBH2
This identity is grouped by exact name match (no disambiguated inventor record was available for these filings) — it may combine same-named inventors.
Top patents by PatentIndex Score
2 records- 0162US2026072357A1Method for operating a solid-state actuator in a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0261US12546921B2Mirror assembly and optical assembly comprising sameZEISS CARL SMT GMBH·Filed 2022·Granted Feb 10, 2026·0 cites·8 claims
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Identity basis: exact name match across USPTO filings. How scoring works →